APLEX, INC
830 Stewart Drive, Sunnyvale, CA 94086
Professional profile
Albert Hu San Jose, CA
| United States Patent | Inventor | Appl. No. | Assignee |
|---|---|---|---|
|
#6146249 Nov 14, 2000 Filed: Oct 22, 1998 |
Albert Hu (San Jose, CA) Burford J. Furman (Mountain View, CA) Mohamed Abushaban (San Jose, CA) | 9/177089 |
Aplex, Inc. (Sunnyvale, CA) |
| International Classification: | B24B 100 | 451 41 |
Patent:
Apparatus and method for polishing a flat surface using a belted polishing pad
Abstract:
The present invention relates to an apparatus and method of Chemical Mechanical Planarization ("CMP") for wafer, flat panel display (FPD), and hard drive disk (HDD). The preferred apparatus...